Silicon carbide electromechanical resonators

Silicon carbide (SiC) flexural-mode resonators have been fabricated and actuated. Single-clamped beam (cantilever) and circular (ring) structures have been fabricated with top electrodes made of aluminium (Al). Ring structures have been shown to achieve higher resonant frequencies, in the megahertz...

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Veröffentlicht in:	Proceedings of the Institution of Mechanical Engineers. Part N, Journal of nanoengineering and nanosystems Journal of nanoengineering and nanosystems, 2009-01, Vol.223 (3-4), p.87-97
Hauptverfasser:	Mastropaolo, E, Gual, I, Cheung, R
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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