Selection of parameters for μE-beam welding

Electron beam welding is a well known process used where high precision, high reliability welds are needed, often in exotic materials. Recently, it has been proposed to apply the electron beam produced in a standard scanning electron microscope (SEM), with reversible modifications to increase beam current, for microscale welding. In addition to providing the clean environment associated with the column vacuum, the SEM in imaging mode provides exceptional capabilities in visualising extremely small parts. Furthermore, the standard stage and beam motion controls offer the possibility of flexible programming of beam path with relatively minor software additions. In order to better evaluate the requirements for and effects of μE-beam welding (μEBW) on typical microtechnologically important materials, a clear understanding of the characteristics of the SEM's beam and its interaction with possible target materials is needed. The penetration ability of electrons depends strongly upon their accelerating voltage and the target they are being directed at. Hence, in some circumstances the beam may interact as a surface heat source, while in others it may act as a volume heat source, with important consequences on weld schedule development for the parts and geometry being welded. In this work, the authors explore some of the factors involved and propose simple models for the electron beam heat source which depend on the parameters being used.