Principle and application of the constant strain rate tensile test with in situ scanning electron microscopy for evaluation of the adhesion of films

Based on the theory of mechanics of materials, a constant strain rate tensile test with in situ scanning electron microscopy (SEM) for measuring the adhesion of PVD films was developed, and the adhesion of a film to a substrate was determined in terms of the shear strain energy of the film during th...

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Veröffentlicht in:Journal of adhesion science and technology 1997-01, Vol.11 (1), p.127-136
Hauptverfasser: Yu, L., Liu, J.W., Dai, S.X., Jin, Z.J.
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container_end_page 136
container_issue 1
container_start_page 127
container_title Journal of adhesion science and technology
container_volume 11
creator Yu, L.
Liu, J.W.
Dai, S.X.
Jin, Z.J.
description Based on the theory of mechanics of materials, a constant strain rate tensile test with in situ scanning electron microscopy (SEM) for measuring the adhesion of PVD films was developed, and the adhesion of a film to a substrate was determined in terms of the shear strain energy of the film during the elongation of the film/substrate combination, i.e. the adhesion depends on the elongation ΔL of the film/substrate combination. The adhesion of three different TiN films prepared by different processes was evaluated by the constant strain rate tensile test with in situ SEM and the conventional scratch test. The results of the two tests show that (1) when the films are thin the adhesion values are in good agreement, but for the thick films with increasing thickness the adhesion decreases in the tensile test while the adhesion first increases and then decreases in the scratch test and (2) for three different TiN films of the same thickness, the identical adhesion order was obtained in the two tests.
doi_str_mv 10.1163/156856197X01065
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The adhesion of three different TiN films prepared by different processes was evaluated by the constant strain rate tensile test with in situ SEM and the conventional scratch test. The results of the two tests show that (1) when the films are thin the adhesion values are in good agreement, but for the thick films with increasing thickness the adhesion decreases in the tensile test while the adhesion first increases and then decreases in the scratch test and (2) for three different TiN films of the same thickness, the identical adhesion order was obtained in the two tests.</description><identifier>ISSN: 0169-4243</identifier><identifier>EISSN: 1568-5616</identifier><identifier>DOI: 10.1163/156856197X01065</identifier><identifier>CODEN: JATEE8</identifier><language>eng</language><publisher>Leiden: Taylor &amp; Francis Group</publisher><subject>Adhesion ; Applied sciences ; constant strain rate tensile test with in situ SEM ; Exact sciences and technology ; Metals. 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The adhesion of three different TiN films prepared by different processes was evaluated by the constant strain rate tensile test with in situ SEM and the conventional scratch test. The results of the two tests show that (1) when the films are thin the adhesion values are in good agreement, but for the thick films with increasing thickness the adhesion decreases in the tensile test while the adhesion first increases and then decreases in the scratch test and (2) for three different TiN films of the same thickness, the identical adhesion order was obtained in the two tests.</description><subject>Adhesion</subject><subject>Applied sciences</subject><subject>constant strain rate tensile test with in situ SEM</subject><subject>Exact sciences and technology</subject><subject>Metals. 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subjects Adhesion
Applied sciences
constant strain rate tensile test with in situ SEM
Exact sciences and technology
Metals. Metallurgy
Nonmetallic coatings
Production techniques
scratch test
Surface treatment
TiN films
title Principle and application of the constant strain rate tensile test with in situ scanning electron microscopy for evaluation of the adhesion of films
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