Modification of polymers with UV excimer radiation from lasers and lamps

Photochemical dry etching and surface modification of various polymers, e.g. polymethylmethacrylate (PMMA), polyimide (PI), polyethyleneterephthalate (PET) and polytetrafluoroethylene (PTFE) were investigated with coherent and incoherent excimer UV sources. Ablation rates of PMMA were measured as a...

Ausführliche Beschreibung

Bibliographische Detailangaben

Veröffentlicht in:	Journal of adhesion science and technology 1994-01, Vol.8 (10), p.1179-1210
Hauptverfasser:	Zhang, Jun-Ying, Esrom, Hilmar, Kogelschatz, Ulrich, Emig, Gerhard
Format:	Artikel
Sprache:	eng
Schlagworte:	ablation of polymers adhesion of metal layers Modification of polymers PET photo-oxidation photochemical dry etching PMMA UV excimer sources (laser and lamp)
Online-Zugang:	Volltext
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!