Spin Speed and Duration Dependence of TiO 2 Thin Films pH Sensing Behavior

Titanium dioxide (TiO 2 ) thin films were applied as the sensing membrane of an extended-gate field-effect transistor (EGFET) pH sensor. TiO 2 thin films were deposited by spin coating method and the influences of the spin speed and spin duration on the pH sensing behavior of TiO 2 thin films were i...

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Veröffentlicht in:	Journal of sensors 2016-12, Vol.2016, p.1-8
Hauptverfasser:	Zulkefle, Muhammad AlHadi, Abdul Rahman, Rohanieza, Yusof, Khairul Aimi, Abdullah, Wan Fazlida Hanim, Rusop, Mohamad, Herman, Sukreen Hana
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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