A Kind of Coating Method of GaN-MOCVD Graphite Susceptor

A novel coating method for the GaN-MOCVD graphite susceptor is proposed in the paper, which means that the upper surface and sides of the graphite susceptor are covered with a low emissivity material coating, and the surface under the susceptor is covered with a high emissivity SiC coating. By using...

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Veröffentlicht in:	Journal of nanomaterials 2013-01, Vol.2013 (2013), p.1-6
Hauptverfasser:	Xi, Zai-fang, Jin, Li, Li, Hai-ou, Hu, Shi-gang, Wu, Xiao-feng, Ying-lu, Hu
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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