Discrimination of Binary Gas Mixture Using CMUT Based Sound Attenuation Spectrum Gas Sensor

Introduction In order to overcome the long term stability issues caused by functionalized films in gas sensing [1], uncoated sensors have become increasingly attractive for applications where the selectivity is not a major concern such as industrial gas monitoring. Despite their poor selectivity, di...

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Veröffentlicht in:	Meeting abstracts (Electrochemical Society) 2021-05, Vol.MA2021-01 (59), p.1592-1592
Hauptverfasser:	Iglesias Hernandez, Luis, Shanmugam, Priyadarshini, Michaud, Jean-François, Alquier, Daniel, Certon, Dominique, Dufour, Isabelle
Format:	Artikel
Sprache:	eng
Schlagworte:	Engineering Sciences Micro and nanotechnologies Microelectronics
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