CMUT Time of Flight Gas Sensor By Phase Shift Measurement

Introduction The most common approach to measure a gas concentration consists in coating the exposed part of a sensor with a functionalized film in order to absorb the targeted gas [1]. However, it is well known that a sensitive coating compromises the long term stability of the sensor mostly due to...

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Bibliographische Detailangaben

Hauptverfasser:	Iglesias, Luis, Shanmugam, Priyadarshini, Michaud, Jean-François, Alquier, Daniel, Certon, Dominique, Dufour, Isabelle
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Engineering Sciences Micro and nanotechnologies Microelectronics
Online-Zugang:	Volltext
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