Analysis of Cathodic Reaction Process of SiCl 4 during Si Electrodeposition in Ionic Liquids

Analysis of Cathodic Reaction Process of SiCl 4 during Si Electrodeposition in Ionic Liquids

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Veröffentlicht in:Journal of the Electrochemical Society 2017, Vol.164 (14), p.D994-D998
Hauptverfasser: Tsuyuki, Yasuhiro, Fujimura, Tatsuki, Kunimoto, Masahiro, Fukunaka, Yasuhiro, Pianetta, Piero, Homma, Takayuki
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container_end_page D998
container_issue 14
container_start_page D994
container_title Journal of the Electrochemical Society
container_volume 164
creator Tsuyuki, Yasuhiro
Fujimura, Tatsuki
Kunimoto, Masahiro
Fukunaka, Yasuhiro
Pianetta, Piero
Homma, Takayuki
description
doi_str_mv 10.1149/2.0761714jes
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title Analysis of Cathodic Reaction Process of SiCl 4 during Si Electrodeposition in Ionic Liquids
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