Surface Morphology Evolution Induced by Multiple Femtosecond Laser Ablation on 4H-SiC Substrate and Its Application to CMP

4H silicon carbide (SiC) substrates were processed by multiple femtosecond (fs) laser ablation. Its surface morphologies changed dramatically at different scanning pitches, different scanning velocities, different repetition rates and near-threshold fluence. The evolution of surface morphologies and...

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Veröffentlicht in:	ECS journal of solid state science and technology 2017-01, Vol.6 (12), p.P853-P861
Hauptverfasser:	Wang, Chengwu, Kurokawa, Syuhei, Doi, Toshiro, Yuan, Julong, Lv, Binghai, Zhang, Kehua
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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