Investigation of Mechanical Stresses in SiC/Porous-Si Heterostructure

This study presents an investigation into the properties of SiC/por-Si structures obtained by the method of coordinated substitution of atoms (MCSA). Experimentally, it was determined that during the formation of the SiC layer, the ordered mesoporous structure of the silicon substrate is significant...

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Veröffentlicht in:	ECS journal of solid state science and technology 2024-11, Vol.13 (11), p.114003
Hauptverfasser:	Kidalov, V. V., Revenko, A. S., Duleba, D., Redko, R. A., Assmann, M., Gudimenko, A. I., Johnson, R. P.
Format:	Artikel
Sprache:	eng
Schlagworte:	mechanical stresses nanoscale materials SiC silicon silicon carbide surface modification surface science theory and modelling
Online-Zugang:	Volltext
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