(Invited) Luminescence Properties of Silicon-Rich Silicon Nitride Films and Light Emitting Devices

Silicon-rich silicon nitride (SiNX) films have attracted enormous interests due to their promising luminescence properties and well compatibility with current CMOS technique. In this short review, the fabrication process of SiNX was addressed as well as their chemical composition and structure. The...

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Bibliographische Detailangaben

Hauptverfasser:	Xie, Min, Li, Dongsheng, Wang, Feng, Yang, Deren
Format:	Tagungsbericht
Sprache:	eng
Online-Zugang:	Volltext
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