Design and Fabrication of Silicon PiezoMOS Transistors for Applications on MEMS

This article describes the project, manufacturing and characterization of silicon piezoMOS transistors made entirely in Brazil. PMOS transistors were designed observing some rules to maximize the piezoMOS effect. A back-side bulk micromachining post-process based on KOH etching was used to make a me...

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Bibliographische Detailangaben

Hauptverfasser:	Guimarães, Daniel D., Garcia, Vitor, Fruett, Fabiano
Format:	Tagungsbericht
Sprache:	eng
Online-Zugang:	Volltext
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