Humidity Effects on Substrate Bonding for Silicon-On-Glass

Glass-to-silicon bonding quality has been studied as a function of air relative humidity in a pre-bonding tool. Two bond-activation techniques, wet and plasma, were used. Optimum ranges of air humidity that ensure high bonding yield are determined. The bonding is finalized by annealing and types of...

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Bibliographische Detailangaben

1. Verfasser:	Usenko, Alex
Format:	Tagungsbericht
Sprache:	eng
Online-Zugang:	Volltext
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