Analysis of the Homogeneous Thermal Decomposition of the Tungsten Dimethylhydrazido Complex Cl 4 (CH 3 CN)W(NNMe 2 ) Using In Situ Raman Spectroscopy and DFT Calculations

The gas-phase decomposition pathways of the tungsten dimethylhydrazido complexes Cl4(RCN)W(NNMe2) (1a: R = CH3; 1b: R = Ph), precursors for single source deposition of WNxCy, were investigated using a combination of experiments and calculations. Raman scattering experiments were performed in an impi...

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Hauptverfasser:	Lee, Jooyoung, Kim, Dojun, Kim, Oh Hyun, Anderson, Tim, Koller, Jürgen, Denomme, Dan, Habibi, Sophia Z., McElwee-White, Lisa
Format:	Tagungsbericht
Sprache:	eng
Online-Zugang:	Volltext
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