Dynamics of Pulsed DC Discharges Used for PACVD of a-C:H:Si

Although a-C:H:Si is insulating, high quality a-C:H:Si coatings can be deposited by pulsed DC PACVD at moderate temperatures. In order to understand these results the discharge was investigated by different methods with microsecond resolution. It turned out that for a proper selection of the operati...

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Bibliographische Detailangaben

Hauptverfasser:	Traxler, Margarethe, Puchhammer, Alexander, Störi, Herbert, Müller, Thomas, Laimer, Johann
Format:	Tagungsbericht
Sprache:	eng
Online-Zugang:	Volltext
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