Embedded NVM Devices with Solid-Phase Crystallized Poly-Si Film on a Glass Substrate for System-on-Panel Applications

Embedded NVM Devices with Solid-Phase Crystallized Poly-Si Film on a Glass Substrate for System-on-Panel Applications

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Veröffentlicht in:Journal of the Electrochemical Society 2009, Vol.156 (10), p.G152
Hauptverfasser: Jung, Sungwook, Nga, Nguyen Thanh, Jang, Kyungsoo, Kim, Doyoung, Choi, Byoungdeog, Mo, Yeongon, Lee, Kiyong, Yi, Junsin
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container_issue 10
container_start_page G152
container_title Journal of the Electrochemical Society
container_volume 156
creator Jung, Sungwook
Nga, Nguyen Thanh
Jang, Kyungsoo
Kim, Doyoung
Choi, Byoungdeog
Mo, Yeongon
Lee, Kiyong
Yi, Junsin
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doi_str_mv 10.1149/1.3186025
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title Embedded NVM Devices with Solid-Phase Crystallized Poly-Si Film on a Glass Substrate for System-on-Panel Applications
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