Impurity Amplification in Ultra High Purity Hydrogen Bromide by Water Catalyzed Reactions from Different Cylinder Materials

Anhydrous HBr used in reactive ion etch chemistries for the semiconductor industry requires strict control of impurities over time. Proper selection of cylinder materials strongly influences the purity of the HBr over the shelf life of the stored gas. In this work Ni-lined AISI 4130 Cr-Mo steel cyli...

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Hauptverfasser:	Seymour, Adam, Torres, Robert, Wyse, Carrie, Yao, Jianlong, Evdokimova, Tanya, Pemberton, Ryan, Raynor, Mark, Lee, Jinhee, Jung, Wonduk
Format:	Tagungsbericht
Sprache:	eng
Online-Zugang:	Volltext
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