Study on CMP Mechanism and Technology of Sapphire Substrate for Photo-conducting Device

Sapphire(α-Al2O3) single crystals are widely used in many areas because of the special properties. As an important photoconducting device substrate material, stringent surface quality requirements are required. The use of CMP technique can produce high quality surface finishes at low cost and with f...

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Bibliographische Detailangaben

Hauptverfasser:	Niu, Xinhuan, Wu, Tao, Zhao, Xiaohong, Tan, Baimei, Liu, Y. L.
Format:	Tagungsbericht
Sprache:	eng
Online-Zugang:	Volltext
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