Cylinder Materials of Construction for Ultra-High Purity HBr in Advanced Semiconductor Etch Processes

Anhydrous HBr used in etch processing for the semiconductor industry requires strict impurity control. However, the gas cylinder material of construction plays a critical role in controlling and maintaining purity levels of the delivered HBr process gas and must be carefully selected. In this work N...

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Bibliographische Detailangaben

Hauptverfasser:	Seymour, Adam J., Wyse, Carrie, Yao, Jianlong, Jha, P., Olsen, E. W., Raynor, Mark, Torres, Robert
Format:	Tagungsbericht
Sprache:	eng
Online-Zugang:	Volltext
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