Electric Field Effects on the Formation of Isolated Macro Porous Silicon

In this paper, we discuss some of the challenges involved in the formation of isolated vertical pores, thereby describing the electric field effects on the pore formation. The diameters of the pore features under investigation range from 5μm to 20μm. A variety of experiments have been conducted, whi...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Vanga, Lakshman Kumar, Oisten, Michael K., Ritzdorf, T., Bergstrom, Paul L.
Format: Tagungsbericht
Sprache:eng
Online-Zugang:Volltext
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