Crystalline Structure of HfZrO Thin Films and ZrO2 / HfO2 bi-Layers Grown by AVD for MOS Applications

Crystalline Structure of HfZrO Thin Films and ZrO2 / HfO2 bi-Layers Grown by AVD for MOS Applications

The downscaling in CMOS transistors requires the introduction of new materials with a higher dielectric constant. The electrical properties of HfxZryOz films and ZrO2 / HfO2 bi-layers grown by Atomic Vapor Deposition were analyzed for their integration as gate oxides. While crystallinity of those la...

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Hauptverfasser: Lhostis, Sandrine, Gaumer, Clement, Bonafos, Caroline, Schamn, Sylvie, Cherkashin, Nikolay, Pierre, Francois, Fanton, Aurélien, Morin, Christine, Ferrieu, F., Casse, Mikael, Garros, Xavier, Leroux, Charles
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Physics
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Zusammenfassung:The downscaling in CMOS transistors requires the introduction of new materials with a higher dielectric constant. The electrical properties of HfxZryOz films and ZrO2 / HfO2 bi-layers grown by Atomic Vapor Deposition were analyzed for their integration as gate oxides. While crystallinity of those layers was found to be dependent on their zirconium concentration, the electrical performance was shown to depend mainly on the growth temperature of the high-k films.
ISSN:1938-5862
1938-6737
DOI:10.1149/1.2911489