Effects of OH Radicals on Formation of Cu Oxide and Polishing Performance in Cu Chemical Mechanical Polishing

Effects of OH Radicals on Formation of Cu Oxide and Polishing Performance in Cu Chemical Mechanical Polishing

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Veröffentlicht in:Electrochemical and solid-state letters 2008, Vol.11 (2), p.H32
Hauptverfasser: Kang, Min Cheol, Nam, Ho-Seong, Won, Ho Youn, Jeong, Sukhoon, Jeong, Haedo, Kim, Jae Jeong
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creator Kang, Min Cheol
Nam, Ho-Seong
Won, Ho Youn
Jeong, Sukhoon
Jeong, Haedo
Kim, Jae Jeong
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doi_str_mv 10.1149/1.2817518
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title Effects of OH Radicals on Formation of Cu Oxide and Polishing Performance in Cu Chemical Mechanical Polishing
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