Damage Clustering and Damage-Size Distributions After Megasonic Cleaning

In this work the damage added on gate stack features after batch megasonic cleaning is identified and classified by SEM review. To understand if damaging is a random or a clustered process, damage clustering distributions are compared with a theoretical random distribution of damage sites. In the da...

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Bibliographische Detailangaben

Hauptverfasser:	De Marco, Cinzia, Wostyn, Kurt L., Bearda, Twan, Sano, Ken-Ichi, Kenis, Karine, Janssens, Tom, Leunissen, Leonardus H.A., Eitoku, Atsuro, Mertens, P.
Format:	Tagungsbericht
Sprache:	eng
Online-Zugang:	Volltext
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