Effect of UV Pretreatment on the Nanopore Formation within Organosilicate Thin Films

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Veröffentlicht in:Journal of the Electrochemical Society 2007, Vol.154 (8), p.G171
Hauptverfasser: Kim, Suhan, Lyu, Yi-Yeol, Hahn, Junhee, Char, Kookheon
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container_end_page
container_issue 8
container_start_page G171
container_title Journal of the Electrochemical Society
container_volume 154
creator Kim, Suhan
Lyu, Yi-Yeol
Hahn, Junhee
Char, Kookheon
description
doi_str_mv 10.1149/1.2741181
format Article
fullrecord <record><control><sourceid>crossref</sourceid><recordid>TN_cdi_crossref_primary_10_1149_1_2741181</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>10_1149_1_2741181</sourcerecordid><originalsourceid>FETCH-LOGICAL-c295t-bf66c6f2674c00eb89f3a58267da32074172318cfe19fc5882e868f8c64444173</originalsourceid><addsrcrecordid>eNotkE9LAzEUxHNQsNYe_Aa5etial2Sz2aOUrgrFetj2uqTxxUb2T0kC4rc3pX2XYX4Dw2MIeQS2BJD1Myx5JQE03JAZYyAKqUq4I_cx_mQLWlYz0q6dQ5vo5OhuTz8DpoAmDThmNNJ0RPphxuk0BaTNFAaTfMa_Ph39SLfhO2fR996ahLQ9s8b3Q3wgt870ERdXnZNds25Xb8Vm-_q-etkUltdlKg5OKascV5W0jOFB106YUmf_ZQRn-feKC9DWIdTOllpz1Eo7bZXMB5WYk6dLrw1TjAFddwp-MOGvA9adJ-igu04g_gGvOE9U</addsrcrecordid><sourcetype>Aggregation Database</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype></control><display><type>article</type><title>Effect of UV Pretreatment on the Nanopore Formation within Organosilicate Thin Films</title><source>Institute of Physics Journals</source><creator>Kim, Suhan ; Lyu, Yi-Yeol ; Hahn, Junhee ; Char, Kookheon</creator><creatorcontrib>Kim, Suhan ; Lyu, Yi-Yeol ; Hahn, Junhee ; Char, Kookheon</creatorcontrib><identifier>ISSN: 0013-4651</identifier><identifier>DOI: 10.1149/1.2741181</identifier><language>eng</language><ispartof>Journal of the Electrochemical Society, 2007, Vol.154 (8), p.G171</ispartof><lds50>peer_reviewed</lds50><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c295t-bf66c6f2674c00eb89f3a58267da32074172318cfe19fc5882e868f8c64444173</citedby><cites>FETCH-LOGICAL-c295t-bf66c6f2674c00eb89f3a58267da32074172318cfe19fc5882e868f8c64444173</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><link.rule.ids>314,776,780,4010,27900,27901,27902</link.rule.ids></links><search><creatorcontrib>Kim, Suhan</creatorcontrib><creatorcontrib>Lyu, Yi-Yeol</creatorcontrib><creatorcontrib>Hahn, Junhee</creatorcontrib><creatorcontrib>Char, Kookheon</creatorcontrib><title>Effect of UV Pretreatment on the Nanopore Formation within Organosilicate Thin Films</title><title>Journal of the Electrochemical Society</title><issn>0013-4651</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2007</creationdate><recordtype>article</recordtype><recordid>eNotkE9LAzEUxHNQsNYe_Aa5etial2Sz2aOUrgrFetj2uqTxxUb2T0kC4rc3pX2XYX4Dw2MIeQS2BJD1Myx5JQE03JAZYyAKqUq4I_cx_mQLWlYz0q6dQ5vo5OhuTz8DpoAmDThmNNJ0RPphxuk0BaTNFAaTfMa_Ph39SLfhO2fR996ahLQ9s8b3Q3wgt870ERdXnZNds25Xb8Vm-_q-etkUltdlKg5OKascV5W0jOFB106YUmf_ZQRn-feKC9DWIdTOllpz1Eo7bZXMB5WYk6dLrw1TjAFddwp-MOGvA9adJ-igu04g_gGvOE9U</recordid><startdate>2007</startdate><enddate>2007</enddate><creator>Kim, Suhan</creator><creator>Lyu, Yi-Yeol</creator><creator>Hahn, Junhee</creator><creator>Char, Kookheon</creator><scope>AAYXX</scope><scope>CITATION</scope></search><sort><creationdate>2007</creationdate><title>Effect of UV Pretreatment on the Nanopore Formation within Organosilicate Thin Films</title><author>Kim, Suhan ; Lyu, Yi-Yeol ; Hahn, Junhee ; Char, Kookheon</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c295t-bf66c6f2674c00eb89f3a58267da32074172318cfe19fc5882e868f8c64444173</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2007</creationdate><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Kim, Suhan</creatorcontrib><creatorcontrib>Lyu, Yi-Yeol</creatorcontrib><creatorcontrib>Hahn, Junhee</creatorcontrib><creatorcontrib>Char, Kookheon</creatorcontrib><collection>CrossRef</collection><jtitle>Journal of the Electrochemical Society</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Kim, Suhan</au><au>Lyu, Yi-Yeol</au><au>Hahn, Junhee</au><au>Char, Kookheon</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Effect of UV Pretreatment on the Nanopore Formation within Organosilicate Thin Films</atitle><jtitle>Journal of the Electrochemical Society</jtitle><date>2007</date><risdate>2007</risdate><volume>154</volume><issue>8</issue><spage>G171</spage><pages>G171-</pages><issn>0013-4651</issn><doi>10.1149/1.2741181</doi><oa>free_for_read</oa></addata></record>
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ispartof Journal of the Electrochemical Society, 2007, Vol.154 (8), p.G171
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language eng
recordid cdi_crossref_primary_10_1149_1_2741181
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title Effect of UV Pretreatment on the Nanopore Formation within Organosilicate Thin Films
url https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-01-29T06%3A52%3A00IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-crossref&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.genre=article&rft.atitle=Effect%20of%20UV%20Pretreatment%20on%20the%20Nanopore%20Formation%20within%20Organosilicate%20Thin%20Films&rft.jtitle=Journal%20of%20the%20Electrochemical%20Society&rft.au=Kim,%20Suhan&rft.date=2007&rft.volume=154&rft.issue=8&rft.spage=G171&rft.pages=G171-&rft.issn=0013-4651&rft_id=info:doi/10.1149/1.2741181&rft_dat=%3Ccrossref%3E10_1149_1_2741181%3C/crossref%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true