Integration of SOI-Based 2D- and Si-Based 3D Photonic Crystals

We present progress towards a generic approach to integrate 2D photonic components embedded in 3D PhCs and couple them to single-mode ridge waveguides. 3D photonic crystals are fabricated by spatially selective self-assembly of silica and PMMA beads into an fcc lattice on a SOI patterned substrate....

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Veröffentlicht in:	ECS transactions 2007-04, Vol.6 (4), p.133-138
Hauptverfasser:	Kocher, Gudrun, Khunsin, Worawut, Romero Vivas, Javier, Vynck, Kevin, Arpiainen, Sanna, Romanov, Sergei, Langer, Birger, Mulot, Mikael, Jonsson, Frederik, Charvolin, Thomas, Hajdi, Emmanuel, Cassagne, David, Zentel, Rudolf, Ahopelto, Jouni, Sotomayor Torres, Clivia M.
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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