Self-Aligned Gaps—An Alternative Technique for Closely Spaced Metallization Patterns

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Veröffentlicht in:	Journal of the Electrochemical Society 1974, Vol.121 (8), p.1124
Hauptverfasser:	Beynon, J. D. E., Haken, R. A., Baker, I. M.
Format:	Artikel
Sprache:	eng
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title	Self-Aligned Gaps—An Alternative Technique for Closely Spaced Metallization Patterns
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