Mechanisms of film growth rate enhancement in anodic and cathodic corona-discharge oxiation [oxidation] processes

Mechanisms of film growth rate enhancement in anodic and cathodic corona-discharge oxiation [oxidation] processes

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Veröffentlicht in:Journal of the Electrochemical Society 1998-08, Vol.145 (8), p.2944-2950
Hauptverfasser: SAYEDI, S. M, LANDHEER, D, LANDSBERGER, L. M, KAHRIZI, M
Format: Artikel
Sprache:eng
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Applied sciences
Electronics
Exact sciences and technology
Microelectronic fabrication (materials and surfaces technology)
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
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container_end_page 2950
container_issue 8
container_start_page 2944
container_title Journal of the Electrochemical Society
container_volume 145
creator SAYEDI, S. M
LANDHEER, D
LANDSBERGER, L. M
KAHRIZI, M
description
doi_str_mv 10.1149/1.1838741
format Article
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source IOP Publishing Journals
subjects Applied sciences
Electronics
Exact sciences and technology
Microelectronic fabrication (materials and surfaces technology)
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
title Mechanisms of film growth rate enhancement in anodic and cathodic corona-discharge oxiation [oxidation] processes
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