Development of a Wide Range pH Sensor based on Electrolyte-Insulator-Semiconductor Structure with Corrosion-Resistant Al[sub 2]O[sub 3]-Ta[sub 2]O[sub 5] and Al[sub 2]O[sub 3]-ZrO[sub 2] Double-Oxide Thin Films

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Veröffentlicht in:Journal of the Electrochemical Society 2004-03, Vol.151 (3), p.H53
Hauptverfasser: Yoshida, Shoji, Hara, Nobuyoshi, Sugimoto, Katsuhisa
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container_title Journal of the Electrochemical Society
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creator Yoshida, Shoji
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Sugimoto, Katsuhisa
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title Development of a Wide Range pH Sensor based on Electrolyte-Insulator-Semiconductor Structure with Corrosion-Resistant Al[sub 2]O[sub 3]-Ta[sub 2]O[sub 5] and Al[sub 2]O[sub 3]-ZrO[sub 2] Double-Oxide Thin Films
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