Metal Induced Lateral Crystallization of Amorphous Silicon Through a Silicon Nitride Cap Layer

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Veröffentlicht in:	Electrochemical and solid-state letters 2003, Vol.6 (1), p.G16
Hauptverfasser:	Choi, Jong Hyun, Kim, Do Young, Choo, Byoung Kwon, Sohn, Woo Sung, Jang, Jin
Format:	Artikel
Sprache:	eng
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doi_str_mv	10.1149/1.1527411
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title	Metal Induced Lateral Crystallization of Amorphous Silicon Through a Silicon Nitride Cap Layer
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