Effect of Gate Electrode Structure on Gate Oxide Integrity

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Veröffentlicht in:Electrochemical and solid-state letters 2003, Vol.6 (1), p.G1
Hauptverfasser: Ryu, Hyuk-Hyun, Cha, Han-Seob, Lee, Jeong-Gun
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creator Ryu, Hyuk-Hyun
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Lee, Jeong-Gun
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title Effect of Gate Electrode Structure on Gate Oxide Integrity
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