Model of Formation and Propagation of Nanoporous Structures in Indium Phosphide during Anodisation in Aqueous KOH

Porous layers are formed in highly doped (1018 cm-3) n-type InP anodised in concentrated aqueous KOH solutions. The pores have a characteristic diameter and propagate along A directions. This preferential etching leads to porous regions with a characteristic tetrahedral shape. We have previously pro...

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Veröffentlicht in:	ECS transactions 2018-01, Vol.85 (13), p.1335-1348
Hauptverfasser:	Keyes, Michael G. M., Quill, Nathan, Bourke, Andrea, O'Dwyer, Colm, Nolan, Clifford J., Clancy, Ian, Buckley, D. Noel, Lynch, Robert P.
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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