Plastic Deformation of Thin Si Membranes in Si-Si Direct Bonding
The effect of bond anneal in Si-Si direct bonding of laminates with thin membranes suspending closed cavities is studied. For membranes of a certain size and thickness, it is found that the under-pressure in the cavity during bond anneal leads to plastic deformation of the membrane. By controlling t...
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| Veröffentlicht in: | ECS transactions 2016-08, Vol.75 (9), p.311-319 |
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| Hauptverfasser: | , , , |
| Format: | Artikel |
| Sprache: | eng |
| Online-Zugang: | Volltext |
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