Diaphragm Durability Enhancement for Valves Supplying Gas for Atomic Layer Deposition

Semiconductor devices are manufactured from Silicon wafers via diverse processes and application-specific equipment that requires supply of various gases. The gas supply system consists of pressure regulators, pressure gauges, filters, flow controllers, valves, fittings etc. The valves in this syste...

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Bibliographische Detailangaben

Hauptverfasser:	Yamaji, Michio, Tanikawa, Tsuyoshi, Yakushijin, Tadayuki, Funakoshi, Takashi, Yamashita, Satoru, Hidaka, Atsushi, Nagase, Masaaki, Ikeda, Nobukazu, Sugawa, Shigetoshi, Ohmi, Tadahiro
Format:	Tagungsbericht
Sprache:	eng
Online-Zugang:	Volltext
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