How to Make Single-Crystalline Membranes in Indium Phosphide
This paper reports on the electrochemical and photo-(electro)chemical fabrication of single-crystalline InP membraneswith homogeneous surfaces allowing for adjustable pore shapesfrom square-like to roundish and various surface morphologiesfrom flat to cone-like pore wall tips. It is also possible to...
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| Veröffentlicht in: | ECS transactions 2013-01, Vol.50 (37), p.121-130 |
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| Hauptverfasser: | , , |
| Format: | Artikel |
| Sprache: | eng |
| Online-Zugang: | Volltext |
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| Zusammenfassung: | This paper reports on the electrochemical and photo-(electro)chemical fabrication of single-crystalline InP membraneswith homogeneous surfaces allowing for adjustable pore shapesfrom square-like to roundish and various surface morphologiesfrom flat to cone-like pore wall tips. It is also possible to keep amesoporous layer on the membrane back side. The InP membranethickness is tunable from several tens of μm to almost 500 μm. |
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| ISSN: | 1938-5862 1938-6737 |
| DOI: | 10.1149/05037.0121ecst |