Imaging Superjunctions in CoolMOS Devices Using Electron Beam Induced Current

Electron beam induced current (EBIC) measurements were used to produce cross sectional images of superjunctions in CoolMOS™ power transistors. The positions of the pn -junctions were determined by EBIC measurements. Knowing the exact locations of the pn -junctions is important for CoolMOS™ since it...

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Bibliographische Detailangaben

Hauptverfasser:	Kirnstötter, S., Faccinelli, M., Hadley, P., Job, R., Schustereder, W., Laven, J. G., Schulze, H.-J
Format:	Tagungsbericht
Sprache:	eng
Online-Zugang:	Volltext
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