Stress in Vacuum Deposited Films of Silver

Measurements have been made of the tensile stress in silver films evaporated in a vacuum of 1–2×10 -5 torr on to mica strips, electron microscopic observations of the film structure being carried out on the other hand. Films having various thicknesses ranging from about 30 Å to 1000 Å were under inv...

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Veröffentlicht in:	Japanese Journal of Applied Physics 1967-01, Vol.6 (1), p.42
Hauptverfasser:	Kinosita, Koreo, Maki, Kunisuke, Nakamizo, Kozo, Takeuchi, Kyoko
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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