Fatigue Testing of Polycrystalline Silicon Thin-Film Membrane Using Out-of-Plane Bending Vibration

This paper describes a new fatigue testing method for polycrystalline-silicon (polysilicon) thin-film membrane to evaluate its mechanical reliability not affected by surface roughness of etched sidewalls. The test specimen is a thin membrane consisting of polysilicon, silicon dioxide, and silicon ni...

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Veröffentlicht in:	Japanese Journal of Applied Physics 2012-11, Vol.51 (11), p.11PA02-11PA02-7
Hauptverfasser:	Tanemura, Tomoki, Yamashita, Shuichi, Wado, Hiroyuki, Takeuchi, Yukihiro, Tsuchiya, Toshiyuki, Tabata, Osamu
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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