Schottky Diodes Prepared with Ag, Au, or Pd Contacts on a MgZnO/ZnO Heterostructure

We successfully fabricated lateral Schottky diodes with a thin MgZnO layer inserted between the ZnO and Schottky contact metal layers. The MgZnO/ZnO heterostructure was deposited onto a $c$-sapphire substrate by pulsed laser deposition using Mg 0.3 Zn 0.7 O and ZnO targets. Ti/Au was used to achieve...

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Veröffentlicht in:	Japanese Journal of Applied Physics 2012-09, Vol.51 (9), p.09MF07-09MF07-5
Hauptverfasser:	Lee, Jong Hoon, Kim, Chang Hoi, Kim, Ah Ra, Kim, Hong Seung, Jang, Nak Won, Yun, Young, Kim, Jin-Gyu, Pin, Min Wook, Lee, Won Jae
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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