Mechanism of Surface Morphology Development of Tin Oxide Transparent Conductive Films

The surface morphology of tin oxide transparent conductive films deposited by chemical vapor deposition was studied. The development of surface crystallites was observed, and the change in the crystalline orientations was evaluated at several stages of film growth. The prismatic and triangular pyram...

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Veröffentlicht in:	Japanese Journal of Applied Physics 2012-02, Vol.51 (2), p.025603-025603-5
Hauptverfasser:	Matsui, Yuji, Matsuishi, Kiyoto, Kojima, Seiji
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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