Chemical Composition and Thermal Stability of Atomic Force Microscope-Assisted Anodic Oxides as Nanomasks for Molecular Beam Epitaxy

We have investigated the thermal stability of GaAs-oxides grown by atomic force microscope (AFM)-assisted anodic oxidation to identify the conditions suitable for fabricating oxide nanomasks for molecular beam epitaxy (MBE). The oxides grown at bias voltages, $V_{\text{ox}}$, less than 30 V were des...

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Veröffentlicht in:	Japanese Journal of Applied Physics 2011-12, Vol.50 (12), p.120205-120205-3
Hauptverfasser:	Cha, Kyu Man, Shibata, Kenji, Kamiko, Masao, Yamamoto, Ryoichi, Hirakawa, Kazuhiko
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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