High-Frequency Electrodeless Quartz Crystal Microbalance Chip with a Bare Quartz Resonator Encapsulated in a Silicon Microchannel

We present a high-frequency electrodeless quartz crystal microbalance (QCM) chip with a bare quartz resonator encapsulated in a silicon microchannel, which is fabricated by micromachining technology. This QCM chip packages an AT-cut quartz plate 2.5 mm long, 1.7 mm wide, and 9.6 μm thick, which is s...

Ausführliche Beschreibung

Bibliographische Detailangaben

Veröffentlicht in:	Japanese Journal of Applied Physics 2011-07, Vol.50 (7), p.07HD03-07HD03-5
Hauptverfasser:	Kato, Fumihito, Ogi, Hirotsugu, Yanagida, Taiji, Nishikawa, Shintaro, Nishiyama, Masayoshi, Hirao, Masahiko
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!