Dielectric Properties of Zr--Al Anodized Thin Film Capacitors Prepared Using Al-Doped Zr Alloy Films

We have examined the dielectric properties of Zr--Al anodized thin film capacitors prepared using Al-doped Zr alloy films to improve the thermal stability and capacitance density of pure-Zr anodized thin film capacitors. The Al content of the Zr--Al anodized film was varied from 0 to 24 at. %. It wa...

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Veröffentlicht in:	Japanese Journal of Applied Physics 2010-10, Vol.49 (10), p.101501-101501-5
Hauptverfasser:	Kimizaki, Hidefumi, Shinkai, Satoko, Sasaki, Katsutaka, Yanagisawa, Hideto, Yamane, Misao, Abe, Yoshio
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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