Modification of Semianalytical Finite Element Model for Radio Frequency Sheaths in Single- and Dual-Frequency Capacitively Coupled Plasmas: Incorporating Ion Density Oscillation at Low Frequency

The semianalytical rf sheath model for single- and dual-frequency capacitively coupled plasmas based on the finite element method has been modified by incorporating ion density oscillation at low frequency into it. Using the new rf sheath model, we have confirmed that the ion density in a one-dimens...

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Veröffentlicht in:	Japanese Journal of Applied Physics 2010-05, Vol.49 (5), p.056202-056202-4
1. Verfasser:	Denpoh, Kazuki
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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