A Real-Time Monitoring System Using a Multimodal Sensor with an Electrical Conductivity Sensor and a Temperature Sensor for Cow Health Control
A multimodal sensor composed of an electrical conductivity (EC) sensor and a temperature sensor on the same Si chip was successfully fabricated using compatible complementary metal oxide semiconductor (CMOS) technology. The EC sensor measured the electrical conductivity between Pt electrodes, and th...
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Veröffentlicht in: | Japanese Journal of Applied Physics 2010-04, Vol.49 (4), p.04DL12-04DL12-4 |
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Hauptverfasser: | , , , , , |
Format: | Artikel |
Sprache: | eng |
Online-Zugang: | Volltext |
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