Temperature Dependence of Transistor Characteristics and Electronic Structure for Amorphous In--Ga--Zn-Oxide Thin Film Transistor

We fabricated an inverted-staggered amorphous In--Ga--Zn-oxide (a-IGZO) thin film transistor (TFT) and measured the temperature dependence of its characteristics. A threshold voltage ($V_{\text{th}}$) shift between 120 and 180 \mbox{ \circ C} was as large as 4 V. In an analysis with two-dimensional...

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Veröffentlicht in:Japanese Journal of Applied Physics 2010-03, Vol.49 (3), p.03CB04-03CB04-6
Hauptverfasser: Godo, Hiromichi, Kawae, Daisuke, Yoshitomi, Shuhei, Sasaki, Toshinari, Ito, Shunichi, Ohara, Hiroki, Kishida, Hideyuki, Takahashi, Masahiro, Miyanaga, Akiharu, Yamazaki, Shunpei
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container_end_page 03CB04-6
container_issue 3
container_start_page 03CB04
container_title Japanese Journal of Applied Physics
container_volume 49
creator Godo, Hiromichi
Kawae, Daisuke
Yoshitomi, Shuhei
Sasaki, Toshinari
Ito, Shunichi
Ohara, Hiroki
Kishida, Hideyuki
Takahashi, Masahiro
Miyanaga, Akiharu
Yamazaki, Shunpei
description We fabricated an inverted-staggered amorphous In--Ga--Zn-oxide (a-IGZO) thin film transistor (TFT) and measured the temperature dependence of its characteristics. A threshold voltage ($V_{\text{th}}$) shift between 120 and 180 \mbox{ \circ C} was as large as 4 V. In an analysis with two-dimensional (2D) numerical simulation, we reproduced the measured result by assuming two types of donor-like states as carrier generation sources. Furthermore, by ab initio molecular dynamics (MD) simulation, we determined the electronic structures of three types of a-IGZO structures, namely, "stoichiometric a-IGZO", "oxygen deficiency", and "hydrogen doping".
doi_str_mv 10.1143/JJAP.49.03CB04
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title Temperature Dependence of Transistor Characteristics and Electronic Structure for Amorphous In--Ga--Zn-Oxide Thin Film Transistor
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