Structural and Physical Characteristics of Ultrananocrystalline Diamond/Hydrogenated Amorphous Carbon Composite Films Deposited Using a Coaxial Arc Plasma Gun

Ultrananocrystalline diamond (UNCD)/hydrogenated amorphous carbon (a-C:H) films were formed without initial nucleation using a coaxial arc plasma gun. The UNCD crystallite diameters estimated from the X-ray diffraction peaks were approximately 2 nm. The Fourier transform infrared absorption spectrum...

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Veröffentlicht in:	Japanese Journal of Applied Physics 2010-01, Vol.49 (1), p.015503-015503-4
Hauptverfasser:	Yoshitake, Tsuyoshi, Nakagawa, You, Nagano, Akira, Ohtani, Ryota, Setoyama, Hiroyuki, Kobayashi, Eiichi, Sumitani, Kazushi, Agawa, Yoshiaki, Nagayama, Kunihito
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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