Pseudo-Single-Nucleus Lateral Crystallization of Si Thin Films

Pseudo-Single-Nucleus Lateral Crystallization of Si Thin Films

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Veröffentlicht in:Japanese Journal of Applied Physics 2008-03, Vol.47 (3S), p.1862
Hauptverfasser: Endo, Takahiko, Taniguchi, Yukio, Katou, Tomoya, Shimoto, Shigeyuki, Ohno, Takashi, Azuma, Kazufumi, Matsumura, Masakiyo
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container_issue 3S
container_start_page 1862
container_title Japanese Journal of Applied Physics
container_volume 47
creator Endo, Takahiko
Taniguchi, Yukio
Katou, Tomoya
Shimoto, Shigeyuki
Ohno, Takashi
Azuma, Kazufumi
Matsumura, Masakiyo
description
doi_str_mv 10.1143/JJAP.47.1862
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source IOP Publishing Journals; Institute of Physics (IOP) Journals - HEAL-Link
title Pseudo-Single-Nucleus Lateral Crystallization of Si Thin Films
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