Monitoring Reaction Products of Novolac Resists during Puddle Development

Monitoring Reaction Products of Novolac Resists during Puddle Development

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Veröffentlicht in:Japanese Journal of Applied Physics 2007-01, Vol.46 (1R), p.128
Hauptverfasser: Eto, Hideo, Ito, Yasuhiro, Homma, Tetsuya
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Sprache:eng
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container_end_page
container_issue 1R
container_start_page 128
container_title Japanese Journal of Applied Physics
container_volume 46
creator Eto, Hideo
Ito, Yasuhiro
Homma, Tetsuya
description
doi_str_mv 10.1143/JJAP.46.128
format Article
fullrecord <record><control><sourceid>crossref</sourceid><recordid>TN_cdi_crossref_primary_10_1143_JJAP_46_128</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>10_1143_JJAP_46_128</sourcerecordid><originalsourceid>FETCH-LOGICAL-c324t-c9b5bdad7fe04b56bcbffc60c7c089cb691f66bdca6e78372c5eba584b3152e63</originalsourceid><addsrcrecordid>eNotkMtKxDAYhYMoWEdXvkD30pp72-Uw3mYYtYiuQ_InkUqnGZJ2wLe3o64O58JZfAhdE1wSwtntZrNsSy5LQusTlBHGq4JjKU5RhjElBW8oPUcXKX3NVgpOMrR-DkM3htgNn_mb0zB2YcjbGOwEY8qDz1_CIfQa5jJ1aY7s9LttJ2t7l9-5g-vDfueG8RKded0nd_WvC_TxcP--eiq2r4_r1XJbAKN8LKAxwlhtK-8wN0IaMN6DxFABrhswsiFeSmNBS1fVrKIgnNGi5oYRQZ1kC3Tz9wsxpBSdV_vY7XT8VgSrIwV1pKC4VDMF9gNXMFGE</addsrcrecordid><sourcetype>Aggregation Database</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype></control><display><type>article</type><title>Monitoring Reaction Products of Novolac Resists during Puddle Development</title><source>IOP Publishing Journals</source><source>Institute of Physics (IOP) Journals - HEAL-Link</source><creator>Eto, Hideo ; Ito, Yasuhiro ; Homma, Tetsuya</creator><creatorcontrib>Eto, Hideo ; Ito, Yasuhiro ; Homma, Tetsuya</creatorcontrib><identifier>ISSN: 0021-4922</identifier><identifier>EISSN: 1347-4065</identifier><identifier>DOI: 10.1143/JJAP.46.128</identifier><language>eng</language><ispartof>Japanese Journal of Applied Physics, 2007-01, Vol.46 (1R), p.128</ispartof><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c324t-c9b5bdad7fe04b56bcbffc60c7c089cb691f66bdca6e78372c5eba584b3152e63</citedby><cites>FETCH-LOGICAL-c324t-c9b5bdad7fe04b56bcbffc60c7c089cb691f66bdca6e78372c5eba584b3152e63</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><link.rule.ids>314,780,784,27923,27924</link.rule.ids></links><search><creatorcontrib>Eto, Hideo</creatorcontrib><creatorcontrib>Ito, Yasuhiro</creatorcontrib><creatorcontrib>Homma, Tetsuya</creatorcontrib><title>Monitoring Reaction Products of Novolac Resists during Puddle Development</title><title>Japanese Journal of Applied Physics</title><issn>0021-4922</issn><issn>1347-4065</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2007</creationdate><recordtype>article</recordtype><recordid>eNotkMtKxDAYhYMoWEdXvkD30pp72-Uw3mYYtYiuQ_InkUqnGZJ2wLe3o64O58JZfAhdE1wSwtntZrNsSy5LQusTlBHGq4JjKU5RhjElBW8oPUcXKX3NVgpOMrR-DkM3htgNn_mb0zB2YcjbGOwEY8qDz1_CIfQa5jJ1aY7s9LttJ2t7l9-5g-vDfueG8RKded0nd_WvC_TxcP--eiq2r4_r1XJbAKN8LKAxwlhtK-8wN0IaMN6DxFABrhswsiFeSmNBS1fVrKIgnNGi5oYRQZ1kC3Tz9wsxpBSdV_vY7XT8VgSrIwV1pKC4VDMF9gNXMFGE</recordid><startdate>20070101</startdate><enddate>20070101</enddate><creator>Eto, Hideo</creator><creator>Ito, Yasuhiro</creator><creator>Homma, Tetsuya</creator><scope>AAYXX</scope><scope>CITATION</scope></search><sort><creationdate>20070101</creationdate><title>Monitoring Reaction Products of Novolac Resists during Puddle Development</title><author>Eto, Hideo ; Ito, Yasuhiro ; Homma, Tetsuya</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c324t-c9b5bdad7fe04b56bcbffc60c7c089cb691f66bdca6e78372c5eba584b3152e63</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2007</creationdate><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Eto, Hideo</creatorcontrib><creatorcontrib>Ito, Yasuhiro</creatorcontrib><creatorcontrib>Homma, Tetsuya</creatorcontrib><collection>CrossRef</collection><jtitle>Japanese Journal of Applied Physics</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Eto, Hideo</au><au>Ito, Yasuhiro</au><au>Homma, Tetsuya</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Monitoring Reaction Products of Novolac Resists during Puddle Development</atitle><jtitle>Japanese Journal of Applied Physics</jtitle><date>2007-01-01</date><risdate>2007</risdate><volume>46</volume><issue>1R</issue><spage>128</spage><pages>128-</pages><issn>0021-4922</issn><eissn>1347-4065</eissn><doi>10.1143/JJAP.46.128</doi></addata></record>
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ispartof Japanese Journal of Applied Physics, 2007-01, Vol.46 (1R), p.128
issn 0021-4922
1347-4065
language eng
recordid cdi_crossref_primary_10_1143_JJAP_46_128
source IOP Publishing Journals; Institute of Physics (IOP) Journals - HEAL-Link
title Monitoring Reaction Products of Novolac Resists during Puddle Development
url https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-01-09T06%3A10%3A25IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-crossref&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.genre=article&rft.atitle=Monitoring%20Reaction%20Products%20of%20Novolac%20Resists%20during%20Puddle%20Development&rft.jtitle=Japanese%20Journal%20of%20Applied%20Physics&rft.au=Eto,%20Hideo&rft.date=2007-01-01&rft.volume=46&rft.issue=1R&rft.spage=128&rft.pages=128-&rft.issn=0021-4922&rft.eissn=1347-4065&rft_id=info:doi/10.1143/JJAP.46.128&rft_dat=%3Ccrossref%3E10_1143_JJAP_46_128%3C/crossref%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true