Measurements of Electron Energy Distribution Functions in Pulse-Modulated Ar and Ar/O 2 Inductively Coupled Plasmas using Laser Thomson Scattering

The time-resolved electron energy distribution functions (EEDFs) in Ar and Ar/O 2 pulse-modulated inductively coupled plasmas have been measured in the afterglow for the first time using laser Thomson scattering. The measurements were performed for RF powers of 100 and 500 W at a frequency of 13.56...

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Veröffentlicht in:	Japanese Journal of Applied Physics 2006-10, Vol.45 (10S), p.8118
Hauptverfasser:	El-Sabbagh, Mansour A. M., Nakamura, Akinobu, Yanagai, Toshiro, Yamagata, Yukihiko, Uchino, Kiichiro
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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